射频辉光放电等离子体的电探针诊断

DIAGNOSIS OF RADIO FREQUENCY GLOW DISCHARGES WITH ELECTRIC PROBE

本文简要叙述了探针诊断技术的作用，比较了单、双探针测量技术的异同，分析了当前所碰到的主要问题和各种可能的解决办法，着重报导了我们提出和制作的加热调谐单探针装置，不仅抑制了射频干扰，还克服了中毒效应对探针测量的影响。首次成功地测量了射频辉光放电硅烷等离子体的电子能量分布函数、电子平均能量和密度。并对测量结果进行了简要的分析。

In this paper, we describe the function of electric probe technique briefly, compare the differences between single and double probe technique, and analyze the present main difficulties in diagnosing RF glow discharges and possible resolving methods. A heated and tuned single probe is reported in detail in this paper. Not only can it suppress the RF interference but also overcome the contamination effect on probe. It has first been used to measure the electron energy distribution fuction, mean electron energy and density successfully. The measured results are discussed briefly.