表面分析的新方法—（RHEED－TRAXS）和（SEM－TRAXS）

The New Methods of Chemical Analysis for Surface-RHEED-TRAXS and SEM-TRAXS

本文综述在反射高能电子衍射仪中测量全反射角ｘ射线谱（简称ＲＨＥＥＤ－ＴＲＡＸＳ）的表面化学分析方法。对这种分析方法的基本原理、主要优点及应用作了概略介绍。本文还介绍了在扫描电镜中进行全反射角ｘ射线谱（简称ＳＥＭ－ＴＲＡＸＳ）测量的方法及结果，并在文章的末尾指出了在扫描中实现（ＳＥＭ－ＲＨＥＥＤ－ＴＫＡＸＳ）的可能性。

A new nethod for chemical analysis of the surfaces by total reflaction angleX-ray spectroscopy in reflection high energy electron diffraction(RHEED-TRAXS)isdescribed.The fundamental principles and advantagies of the method and the applycationof the method to surface analysis are described.The total reflection angle X一rayspectroscopy in scanning electron microscopy(SEM-TRAXS)is also described.At end ofthe paper we prefigure that SEM-RHEED-TRAXS will arrive in scanning electronmicroscopy.