压电超声直线马达驱动电路的研究

Study on the Driving Circuits of the Piezoelectric Ultrasonic Linear Motor

本文介绍了压电超声直线马达的结构和工作原理，分析了清华大学超声研究室研制的超声振子箝位，压电驱动的直线蠕动马达的特点及其驱动电路和信号波形．

This paper introduced the structure and fundamental principle of the piczoclectric ultrasonic linear motor,analyzed advantages of the circular tube linear inchworm motor with ultrasonic gripping vibrator and piezo-electric driver.It is designed and manufactured by Acoustics Laboratory,Department of Physics,Tsinghua University.We studied its driving circuits and voltage signals-wave form.