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超晶格电子辐照缺陷的亚稳态特性 被引量:1

METASTABLE CHARACTERISTICS OF ELECTRON IRRADIATION-INDUCED DEFECTS IN SUPERLATTICES
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摘要 用深能级瞬态谱(DLTS)系统地研究了GaAs(50A)/GaAlAs(50A)超晶格中的电子辐照缺陷,证实其亚稳态特性的存在,对其恢复温度、转变条件进行了研究,指出在体材料中不能观察到电子辐照缺陷亚稳态的原因. Deep Level Transient Spectroscopy (DLTS) was used to study the irradiation-induced defects in GaAs (50A)/GaAlAs (50A) superlattice. The existence of metastability of such defects was demonstrated, and their transition temperature was studied. The reason why these characteristics can not be observed in the bulk materials is pointed out.
出处 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 1994年第3期161-164,共4页 Journal of Infrared and Millimeter Waves
关键词 电子辐照缺陷 超晶格 亚稳态 electron irradiation-induced defects, superlattices, metastability, DLTS.
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参考文献4

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同被引文献9

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  • 8Tanaka N,Ishikawa T. Energy dependence and depth distribution of electron-beam-induced damage in GaAs/A1GaAs heterostructures. J Electron Mater, 1994; 23 (3):341
  • 9黄万霞,林理彬,曾一平,潘量.质子辐照对GaAs/AlGaAs多量子阱材料光学性质的影响[J].Journal of Semiconductors,1999,20(11):957-962. 被引量:6

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