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MOCVD-Hg_(1-x)Cd_xTe/CdTe/GaAs外延材料红外吸收光谱研究 被引量:2

STUDY OF INFRARED ABSORPTION SPECTRA OF Hg1-xCdxTe/CdTe/GaAs FILMS GROWN BY MOCVD
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摘要 从理论上完成对MOCVD工艺生长的HgCdTe/CdTe/GaAs材料的透过率、吸收边和相干行为的计算.结果表明光的干涉条纹与外延层HgCdTe和缓冲层CdTe的总厚度相关,其透过率不能直接反映材料的内在质量.计算结果还表明,外延材料组份的均匀性对红外光谱的吸收边有很大的影响.运用理论计算对实验中测得的光谱曲线进行了分析,发现MOCVD工艺存在着一种部分过饱和态的生长机制,并发现负禁带HgTe薄膜也具有一定的透光特性. The transmittance, absorption edge and interference behaviors were calculated theoretically for the Hg1-xCdxTe/CdTe/GaAs materials grown by MOCVD. The calculation results show that the transmittance of Hg1-xCdxTe film can not reveal the material quajity as that of bulk material. The relationship between the interference wave and Hg1-xCdxTe film thickness is discussed. It also can be found from the calculation of the absorption edge that the composition uniformity of the film has great influence on the absorption edge of the infrared spectra. By analyzing the spectrum properties measured in the experiments, a kind of partial saturated growth mechanism is discovered for MOCVD. Besides, it is found that the HgTe film has also a certain transmission to infrared radiation.
出处 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 1994年第3期191-198,共8页 Journal of Infrared and Millimeter Waves
基金 高技术基金
关键词 薄膜 红外光谱 碲镉汞 红外材料 HgCdTe, film, infrared spectra.
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参考文献8

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同被引文献11

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  • 7周立庆,刘铭,巩锋,董瑞清,折伟林,常米.3英寸CdTe/Si复合衬底外延技术研究[J].激光与红外,2011,41(5):537-541. 被引量:20
  • 8汤定元.红外探测器的发展现状[J].激光与红外,1991,21(1):5-11. 被引量:3
  • 9胡伟达,梁健,越方禹,陈效双,陆卫.新型亚波长陷光结构HgCdTe红外探测器研究进展[J].红外与毫米波学报,2016,35(1):25-36. 被引量:24
  • 10李庆,白杰,吕衍秋,胡伟达,陈效双,陆卫.基于Pt/CdS与InSb光伏型紫外—红外焦平面探测器的双色探测机理(英文)[J].红外与毫米波学报,2017,36(4):385-388. 被引量:4

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