用光波导法测量外延石榴石薄膜的光学参数

Measurement of Optical Parameters of Garnet Liquid Phase Epitaxy Film by the Optical Wave Guide Method

用棱镜耦合在磁性石榴石外延膜进行光导波传输，通过测量传输耦合角，可同时确定外延膜的折射率和厚度．薄膜折射率测量误差为２．８×１０（－３），薄膜厚度测量相对误差为０．０５５．

Optical guided wave transmission has been carried out with a prism coupler in a magnet-ic garnet liquid phase epitaxy film. The refractive index and thickness of the epitaxy film canbe determined simultaneously by measuring the coupling angle. The measuring error of therefractive index of film was found to be 2.8× 10(-3) and relative measuring error of film thick-ness,0.055.Compared with conventional methods,the one here described is of high preci-sion and no complicated data computation is required.