摘要
介绍一种用于曲面形貌特性的测量－分析系统。在触针技术的基础上，采用激光－光栅干涉和散斑干涉条纹微机细分技术并利用计算机图形学原理，解决高精度曲面表面形貌测量问题，讨论了系统工作原理、光电信号处理、软件设计及曲面数据处理模型，给出了初步实验结果。
Anew stylus measuring system for curved topography is described. Laser-grating inter-ference is introduced into the stylus contour graph.Areflective cylindrical hologram diffu-sion (RCHD) grating is used as a standard device to obtain a wide dynamic range and inter-ferometric fringes with microcomputer division are used to give a high resolution. The newstylus system developed is capable of measuring curved surface topography and analyzing ac-curately all kinds of characteristicsprinciples,photoelectric signal processing,hardware andsoftware design and mathematical model of curved surface topography are discussed.Experi-mental results of typical curved surface topography. are given.
出处
《华中理工大学学报》
CSCD
北大核心
1994年第9期4-8,共5页
Journal of Huazhong University of Science and Technology
基金
国家自然科学基金
关键词
测量系统
曲面
表面形貌
接触测量
measuring system
curved surface topography
contact measurement
