光学轮廓仪中微位移调制方法的分析研究

On Micro-Displacement Modulation in an Optical Profilometer

应用ＰＺＴ作为微位移驱动机构，研制的光学轮廓仪的垂直分辨率可达１ｎｍ，可实现对表面Ｒａ从０．１６μｍ至０．０１μｍ的精确测量。在测试分析位移－电压动态响应特性基础上，讨论了微位移调制误差对仪器精度的影响，提出了改善响应线性度的方法，使仪器在工作频率范围内响应的线性度达到１．０８％，保证了仪器的测量槽度。

Byusing PZT as a micro-displacement actuator,the vertical resolution of an optical pro-filometer developed can reach 1 nm,The instrument can perform precision measurement ofsurface Ra within the range of 0.16 μm to 0.01μm,The influence of micro-displacementmodulation error on the measuring accuracy of the instrument is discussed and the researchresults of the micro-displacement modulator are given. Based on the measurement of the dy-namic response curve of displacement-volt,methods for improving the response linearityhave been investigated. As a result,the response linearity within the working frequencyrange of the instrument has reached 1.08%.