在非影像区沉积铜的研究

A Study of the Deposition of Copper in Non-image Area

本文用透射电子及微镜和Ｘ射线光电子能谱仪对非影像区沉积铜的机理进行了研究．结果表明在影像区的银丝经过氯金酸溶液处理后，由原来的连续缠绕状变细小颗粒，非影像区的明胶能将Ａｕ３＋还原．还原过程是一个两步反应．第一步生成Ａｕ＋，这一步在室温下为快反应．明胶对Ａｕ＋有较高的络合能力；第二步生成金质点，在Ｘ射线作用下，Ａｕ＋能迅速地被还原为金质点．被络合的Ａｕ＋和部分被还原的金质点作为物理显影核，在以后的铜物理显影过程申催化铜在非形像区的沉积．

Abstract The mechanism of the deposition of copper in non-image area was studied in this paper byelectron micrography and X-ray electron spetrometry. It was shown that by immersing thesample into chloroauric acid soluhon continuous and tangled silver maments in the image areabroke into tiny grains, but very little silver chloride and few gold specks was formed. The gelatinin the non-image area can reduce An3+. The reduction process might be divided into two steps.The first stop which is fast at the room temperature is the formation of An+ which is complexedby gelatin. The second step the speed of which can be accelerated by X--ray is the formation ofgold sacks. Those complexed An+and gold speCks act as catalytic nuclei during the copperPhysical development depositing copper in the non-boage area.