Fourier拟谱方法及晶体生长的化学气相淀积过程的数值模拟

Fourier Pseudo-spectral Method and Numerical Simulation of CVD Process in Crystal Growth

把在求解不可压Ｎ－Ｓ方程上获得很大成功的Ｆｏｕｒｉｅｒ拟谱方法推广到求解速度和温度交连的Ｎ－Ｓ方程组，并用于晶体生长的化学气相淀积复杂输运过程的数值模拟．结果令人满意．说明了该方法在求解复杂流动问题中有广泛的应用前景。

A Fourier-pseudo-spectral method was used to study the momentum and energytransfer process in complex flow. The analysis of crystal growth in CVD process was carriedout.And the numerical simulate example was given. The result shows that the pseudo- spec-tral method is valid for solving a set of momentum and energy equations.