摘要
高分辨率、高精确度的偏振干涉测长方法在几何量测量中得到了广泛的应用。本文应用严格的数学方法分析了它的测量误差，并提出补偿与消减该项误差的方法。
The polarization interferometry with high resolution and high accuracy is widely used in the measurement of geometrical quantities. In this paper, the measuring errors of this method have been analysed by use of strict mathematical means, and the ways for compensating or reducing these errors are also proposed.
出处
《计量学报》
CSCD
1994年第3期204-209,共6页
Acta Metrologica Sinica
关键词
位移测量
干涉仪
误差
相位
Displacement measurement
Interferometer
Laser
