摘要
介绍一种新型的电容式位移测量系统，其测量范围为０～２５ｍｍ，线性度优于１／１０００，分辨率为０．１μｍ。文中详细分析了该系统的工作原理，特点及主要误差因素，给出了部分实验数据。
A new wide range capacitive displacement measuring system is presented. The measuring range is 0～25mm, linearity is better than 1/10000, and the resolution is 0. 1μm. The operation principle, the feature and the primary error factor of this system are analyzed, and some test data are given.
出处
《计量学报》
CSCD
1994年第3期216-222,共7页
Acta Metrologica Sinica
关键词
电容式
位移测量
精度
Capacitive
Displacement
Measurement
