散斑法测量表面粗糙度R_q的研究

Study on Measurement of Surface Roughness R_q by Speckle

围绕光学测量表面粗糙度Ｒ＿ｑ的精度提高问题，应用Ｌｅｇｅｒ理论，侧重讨论了投射到测量表面的两束激光相干光束之间的夹角δｘ的变化对测量结果的影响，指出了一条提高测量精度和扩大测量范围的有效途径。

The improvement and the precise in measurement of the roughness Rq is studied,above all,the effect of variation in the angle δα between doubly coher-ent light on the surface by using Leger's Laser speckle coherent theory.Then pro-posed is a method for improvement the measurement precision and for develop-ment of the measurement range。