超导材料在激光成膜过程中的颗粒成因

Internal Explosion in Laser Ablation of Super Superconducting Targets

本文计算了激光融蚀超导材料靶时靶内部的温度分布和汽-固界面的移动速度.研究表明,界面内的过热点是超导材料在激光成膜过程中产生微爆炸形成颗粒的原因,讨论了提高成膜质量的方法.

The temperature profile inside a superconducting target in laser ablation is calculated and the receding velocity of the vaper-solid ineerface is determined. The study shows that ,there exist subsurface over-heating sports which product internalexplosion and how to enhance the thin film guality is discussed.