工模具的PAMOCVD涂层研究

Study on the PAMOCVD Coatings of Die and Tool Steels

用传统的TiCl4－H2－N2进行PCVDTiN处理，存在炉体和真空系统被腐蚀及氯元素进入涂层等问题，作者采用金属有机物TPT[（C3H7O）4Ti]或TET[（C2H5O）4Ti]代替TiCl4作为供钛源进行PAMOCVD处理，研究了不同工艺参数对涂层性能的影响。试验表明，H13铝型材挤压模及标准件冲头等采用PAMOCVD处理后寿命可提高1～2倍，并解决了设备被腐蚀的问题。

To reduce the corrosion on the furnace body and the vacuum system due to conventional PCVD TiN process by means of TiCl4-H2-N2 which causes chlorine diffused into the coatings. The authors make use of organometallic compound TPT [C3H7O)4Ti] or TET [(C2H5O)4Ti] instead of TiCl, as the Ti source in PAMOCVD (plasma-assisted metalorganic CVD) process. The influence of various technological parameters on the performance of the coatings are studied. Comparison of die, drill bit and fastener treated by PAMOCVD with those by PCVD TiN coating indicates that their service life are prolonged by 1~2 times. And the Corrosion of equipment is also prevented.