1Cr18Ni9Ti不锈钢氮离子注入层超显微硬度的研究

ULTRA-MICROHARDNESS OF N￣+ IMPLANTED LAYER ON 1Cr18Ni9TiSTAINLESS STEEL

应用超显微硬度计测定１Ｃｒ１８Ｎｉ９Ｔｉ奥氏体不锈钢氮离子注入层的硬度，并用Ａｕｇｅｒ电子能谱仪及高精度轮廊仪测定氮离子注入层氮浓度分布及深度。结果表明，在９０ｋｅＶ，３×１０＾１７Ｎ＾＋／ｃｍ＾２注入时，其注入层深度为０．１８μｍ，用１ｍＮ载荷测得本征硬度ＨＶ为３．４７ＧＰａ，比非注入态表面硬度提高三倍之多，合理的试验载荷应≤１ｍ（０．１ｇ）。

An ultra-microhardness tester typed UMHT-3 was used to measure the characteristic hardness of N+ implanted layer on 1Cr18Ni9Ti stainless steel.Depth and nitrogen concentration profile of the N+ implanted layer were determined by means of AES in combination with high precision profilometer. The depth of N+ implanted layer in 1Cr18Ni9Ti steel is 0.18μm at 90 keV and 3x10￣17 N+/cm2. Its characteristic hardness,HV 3.47 GPa under load of l mN, shows that N+ implantation can increase the surface hardness by more than 3 times. The appropriate testing load selected should be equal or less than l mN.