晶格形变情况下Ga－In－As体系热力学研究

THERMODYNAMICS OF Ga-In-As SYSTEM UNDER LATTICE DEFORMATION

由已有热力学和相图实验数据，用Ｃａｌｐｈａｄ技术优化出一组描述Ｇａ－Ｉｎ－Ａｓ三元体系热力学性质的数学模型，定量估算了在用外延法制作ＩＩＩ－Ｖ族化合物时，由于外延层和衬底晶格不匹配，外延分子晶格弹性形变的形变能对固液平衡相图的影响，计算相图和实验结果基本一致．

The parameters of the thermodynamic model for the ternary system Ga-In-As are optimized from the available experimental data,and the influence of the elastic energy on the phase diagram,induced by the dismatch of the growing lattice with the substrate,is quantified.