摘要
用真空双源蒸镀法在Si单晶衬底上制备了Fe,Dy原子数比为3:2的Fe─Dy成分调制多层膜.用AES、RBS、X射线衍射(XRD)以及磁性测量分析了Ar^(+)混合前后Fe─Dy多层膜的相交.Ar^(+)离子注入能量110keV,剂量5×10^(15)─1×10^(17)/cm~2.结果表明,注入剂量为1×10^(17)/cm~2时,Fe,Dy完全混合,并且由晶态的Fe,Dy完全转变为Fe_(60)Dy_(40)(近似于该化学配比)的非晶态合金,随Ar^(+)注入量的增加,Fe一Dy多层膜的M_s下降,在剂量50×10^(15)/cm~2时下降幅度最大。
Compositionally modulated Fe-Dy films were prepared by alternate evaporation of the two elements onto Si single crystal substrates. Atomic ratio (Fe:Dy) of the film is about 3: 2. Auger electron spectrometry (AES), Rutherford backscattering spectrometry (RBS), X-ray diffraction (XRD), and measurements of magnetic properties were used to study the changes of the films after Ar ion beam mixing.The ion energy and the dose range were 110 keV and 5×10 ̄15-1×10 ̄(17)cm ̄(-2); respectively. It was found that, complete mixing of the films can be achieved at an ion fluence of1×10 ̄(17)cm ̄(-2). At this point, the films transformed from a mixture of crystals to an amorphous alloy completely. The saturation magnetization M_s of the films decreases after ion beam mixing. In particular, M_s drops sharply for the ion fluences being equal to or less than 5 × 10 ̄15 cm ̄-2.
出处
《金属学报》
SCIE
EI
CAS
CSCD
北大核心
1994年第4期A160-A163,共4页
Acta Metallurgica Sinica
关键词
铁镝多层膜
离子束混合
结构
性能
Fe-Dy multilayer films. ion beam mixing, amorpohization, magnetic property.