Ar^（＋）混合Fe－Dy多层膜的结构及性能

STRUCTURE AND PROPERTIES OF Fe-Dy MULTILAYER IMPLANTED WITH Ar￣(+)

用真空双源蒸镀法在Ｓｉ单晶衬底上制备了Ｆｅ，Ｄｙ原子数比为３：２的Ｆｅ─Ｄｙ成分调制多层膜．用ＡＥＳ、ＲＢＳ、Ｘ射线衍射（ＸＲＤ）以及磁性测量分析了Ａｒ^（＋）混合前后Ｆｅ─Ｄｙ多层膜的相交．Ａｒ^（＋）离子注入能量１１０ｋｅＶ，剂量５×１０^（１５）─１×１０^（１７）／ｃｍ~２．结果表明，注入剂量为１×１０^（１７）／ｃｍ~２时，Ｆｅ，Ｄｙ完全混合，并且由晶态的Ｆｅ，Ｄｙ完全转变为Ｆｅ_（６０）Ｄｙ_（４０）（近似于该化学配比）的非晶态合金，随Ａｒ^（＋）注入量的增加，Ｆｅ一Ｄｙ多层膜的Ｍ_ｓ下降，在剂量５０×１０^（１５）／ｃｍ~２时下降幅度最大。

Compositionally modulated Fe-Dy films were prepared by alternate evaporation of the two elements onto Si single crystal substrates. Atomic ratio (Fe:Dy) of the film is about 3: 2. Auger electron spectrometry (AES), Rutherford backscattering spectrometry (RBS), X-ray diffraction (XRD), and measurements of magnetic properties were used to study the changes of the films after Ar ion beam mixing.The ion energy and the dose range were 110 keV and 5×10￣15-1×10￣(17)cm￣(-2); respectively. It was found that, complete mixing of the films can be achieved at an ion fluence of1×10￣(17)cm￣(-2). At this point, the films transformed from a mixture of crystals to an amorphous alloy completely. The saturation magnetization M_s of the films decreases after ion beam mixing. In particular, M_s drops sharply for the ion fluences being equal to or less than 5 × 10￣15 cm￣-2.