激光烧蚀速率精密调节的新技术

A NEW TECHNIQUE FOR FINE ADJUSTMENT OF LASER-ABLATION RATE

提出了一种精密调节激光烧蚀速率的方法——双光束技术,得到了比单光束技术约高两个数量级的调节精度。对这种双光束调节的机制进行了解释。

A two-beam technique has been presented as a new method to adjust laser-ablation rate. An adjust accuracy of about two orders of magnitude higher than that in usual one-beam technique was obtained. The mechanism of the two-beam adjusting is explained in terms of the calculation result of surface temperature increase in laser heating.