钽的氮离子注入法研究

On the Method of N-ion Implantation in Ta-Surface

实验研究证实，通过氮离子注入的方法对钽基材进行表面强化，可大大提高钽村的表层硬度及耐蚀性能。俄歇电子能谱及Ｘ射线衍射分析表明，Ｔａ注入Ｎ＋后生成了新相ＴａＮｏ．１。

In this paper, it has been shown that the hardness and the anti-corrosion properties of the Ta-surface will be greatly improved by use of the N-ion implantation. Analysis with the Auger electron spectroscopy and the X-ray diffraction has indicated the formation of a new phase TaN0.1 after this implantation.