薄膜氧敏材料的特性研究

A Study of Characterization of Thin-Films Oxygen-Sensitive Material

用电子束蒸发的方法制备了ＺｒＯ＿２、ＴｉＯ＿２及其按不同配比混合和掺杂的各种薄膜。对薄膜的结构和氧敏特性进行了研究，同时还研究了预烧结、掺杂等对薄膜氧敏特性的影响。实验表明。

n this paper, the preparation of ZrO_2、TiO_2 thin-films with different impurities by using elec-tron-beam evaporation method is reported. The structure and Oxygen-sensitive properties of thin-films are studied, and the effects of first sintering and impurity to thin-films Oxygen-sensitiveproperties are also studied as well. The experimental result shows that thin-films have higher sen-sitivity and selectivity to Oxygen.