燃烧火焰法沉积金刚石膜的生长特性

Distribution of the Diamond Film Synthesised by a Combustion Flame Methods

我们采用普通的ＨＯ２－１型氧－乙炔微型焊炬，沉积出了全范围晶型良好的高质量金刚石膜，并用扫描电镜和激光拉曼散射光谱研究了其生长的区域分布特性。研究表明，金刚石的生长速率、杂质含量及形貌等均呈径向分布，整个生长区域可分为中心区、次外环形区和边缘环形区三部分。通过实验和理论上的分析，认为这种金刚石生长的三区分布特性是与火焰中的原子Ｏ、－ＯＨ基团及内焰与基底交界处各种含碳原子基团如－ＣＨ＿３、Ｃ＿２Ｈ＿２、Ｃ＿２等在径向上的分布规律相对应的。而这些基团的径向分布则直接受到温度最高且具有很强氧化性的外焰的影响。

High quality diamond films crystalized well all over the deposition areas have been synthesised by a combustion flame method with a commercial oxy-acetylene torch.Scanning electron microscopy and Raman spectroscopy studies show that the diamond films could be distributed radially into three zones, which are the centre zone,the secondary annular zone and the boundary annular zone,by their different features such as growth rate, purity and morphologies. The experiments and the theoretical ana1ysis indicate that this three-zoned distribution of the diamond films deposited by an oxy-acetylene combustion flame is due to the radial distributions of the atomic O atoms,-OH radicals and C-contained radicals such as-CH_3,C_2H_2, C_2 etc. in the boundary layer between the flame and the substratel and the distributions of these radicals are correlated with the effect of the highest temperature and very strong oxidizationed outer flame.