摘要
本文重点介绍了将支承基底直接作为电化学电极,用电化学方法将导电有机物薄膜聚合沉积在其上形成的薄膜支承的结构特点和制作方法;探讨了其在纳米级表面形貌和轮廓测试仪等精密和超精密测试中的应用前景。
This paper introduces a sliding system for feeding guideway suitable for precision and superprecision testing instrumentation. It emphasically describes structure characteristics and fabricating method of the thin-film bearing. And finally it inquires into the prospects for applying the bearing to nanosurface topography and profilographic testing instrumentation
出处
《润滑与密封》
CAS
CSCD
北大核心
1994年第1期36-39,共4页
Lubrication Engineering