摘要
采用平垫层与单色仪分频相结合的方法,得到了不同波长干涉图像。经过图像处理,使按此原理设计的NGY—1型膜厚测量仪实现了纳米量级的膜厚测量。并对测量仪进行了精度分析和实际测试。
In this paper oil film thickness are measured from the interference fringe maps with different light wave length by using a flat layer which can replace oil film and a monochromator which can put the light into monochromic one. A measuring instrument, NGY-1, was designed to measure sub-micrometer and nanometer film. Then the precision of the instrument was analysed.
出处
《润滑与密封》
CAS
CSCD
北大核心
1994年第1期27-30,15,共5页
Lubrication Engineering
关键词
光干涉
润滑膜
纳米级
膜厚测量
interference, Nonochromic, nanometer film thickness measurement
