摘要
本文较全面地介绍了微电子工艺模拟、半导体器件模拟。
This paper comprise some work of author and overall recommend the application of microelectronic techique simulate,semiconductor device simulate,electron ciruit simulate in the microelectronic field.
出处
《山东科学》
CAS
1994年第1期10-14,共5页
Shandong Science
关键词
工艺模拟
器件模拟
微电子
CAD
technique simulate
device simulate
circuit simuiat