摘要
作者在多年实验工作的基础上，论述了离子束增强沉积薄膜合成及其在材料表面优化中的应用、所用设备、膜的合成、表面优化技术与机理，并展望了前景。
On the ground of many years'laboratory work of the author,the synthesis of reinforced ionic beam deposited films,their application in the surface optimization of materials,the equipments used, the techniques and mechanism of film synthesis and surface optimization are related.The prospects are also looked forward.
出处
《上海有色金属》
CAS
1994年第2期65-72,共8页
Shanghai Nonferrous Metals
关键词
离子束沉积
薄膜合成
表面优化
Ionic beam deposition
Film synthesis
Material reinforcement
Surface optimization
