工业反应过程的开发方法Ⅺ．CVD法超细粒子粒度控制方法

Methodology for the Development of Industrial Reaction ProcessesⅪ .Ultrafine Particle Size Distribution Control in the CVD Proeess

通过过程分析导出了ＣＶＤ合成超细粒子过程的一般动力学方程，通过鉴别试验确立了ＣＶＤ合成超细粒子过程的两大特征，简化了过程动力学方程，并进而建立了ＣＶＤ反应器中超细粒子粒度分布控制的反应－凝并模型。设计试验检验了模型的可靠性，并利用该模型对ＣＶＤ过程进行深入研究。

Through process analysis a generalized kinetics equation for ultrafine particle syntliesisby CVD method is introduced, and two primary features are decided by identification experi-ment.The kinetics equation is simplified and a reaction-coagulation model for the controlof ultrafine particle size distribution is established.Experiments are designed to test themodel reliability and then it is used for further study on the CVD process.