摘要
通过过程分析导出了CVD合成超细粒子过程的一般动力学方程,通过鉴别试验确立了CVD合成超细粒子过程的两大特征,简化了过程动力学方程,并进而建立了CVD反应器中超细粒子粒度分布控制的反应-凝并模型。设计试验检验了模型的可靠性,并利用该模型对CVD过程进行深入研究。
Through process analysis a generalized kinetics equation for ultrafine particle syntliesisby CVD method is introduced, and two primary features are decided by identification experi-ment.The kinetics equation is simplified and a reaction-coagulation model for the controlof ultrafine particle size distribution is established.Experiments are designed to test themodel reliability and then it is used for further study on the CVD process.
出处
《石油化工》
CAS
CSCD
北大核心
1994年第6期383-387,共5页
Petrochemical Technology
基金
国家自然科学基金
关键词
超细粒子
粒度
气相沉积
ultrafine particle, particle size distribution,chemical vapor deposition