CCD器件在激光干涉测试中的应用

APPLICATION OF CCD TO LASER INTERFEROMETRY

本文以电弧等离子体激光干涉诊断为例论述了用CCD作为光电传感器对干涉条纹进行自动检测的原理和实验结果。结果表明,这一方法不仅大大缩短了条纹判别时间,而且可消除人为误差,实现了测试过程的连续化和自动化,为电弧等离子体等过程的实时控制奠定了基础。

In this paper the diagnosis of arc plasma serves as the example to illustrate the principle and experimental results of automatic measurements of laser interference fringes with CCD. The example shows that the time required to distinguish fringes is greatly reduced, and the artificial errors are eliminated. The continuity and automization of the measurement provide the basis for real time control of arc plasma process.