摘要
利用离子束辅助技术在黄铜与20 ̄#钢衬底上进行了沉积MoS_x膜的研究,对该膜在常温大气环境中的摩擦磨损特性用针-盘磨损试验进行了评价;用XRD和XPS检验了磨损前后膜的生成相、组分及Mo元素价态的变化,发现不同衬底上的MoS_x膜在磨损中出现显著不同的结晶学变化,并对这一现象作了讨论。
MoS_x films in 200nm thickness are deposited onto brass and No.20 steel by the ionbeam asekisted technique , respoctively. Their friction and wear properties are evaluated using a pin-on-disk arrangement in atmosphere at the room temperature ,phases ,composition of these films and changein chemical valence of the Mo element are examined by XRD and XPS before and after the weartestes , respectively. The authors have observed that a different obvious crystallography change ofMoS_x films on the different substrates is appeared. The phenomen is disscused in this paper.
出处
《四川大学学报(自然科学版)》
CAS
CSCD
1994年第4期495-500,共6页
Journal of Sichuan University(Natural Science Edition)
关键词
二硫化钼
离子束
沉积
薄膜
molybdenum disulphide , ion beam assisted dposition,friction,wear