摘要
本文从对准象及其对精度的影响这二个方面,对明场和暗场二种光学对准方式作比较分析,指出暗场对准是一种理想的对准方式,并阐述了引起这一结果的原因。
After Comparing the Dark-field alignment with Bright-field alignment from the image and it's effect on the precision, the result is that the Dark-field alignment is the ideal type. The reason of it is afso given.
出处
《苏州大学学报(自然科学版)》
CAS
1994年第3期258-261,共4页
Journal of Soochow University(Natural Science Edition)
关键词
明场
暗场
几何光学
对准成象
dark-field alignment, bright-field alignment .alignment precision.