不同后处理方法对反应蒸发制备的氧化锡膜表面形貌的影响

THE SUPERFICIAL MORPEOLOGY OF REACTIVE EVAPORATING PREPARED THIN FILM OF TIN OXIDE AFFECTED BY DIFFERENT POST TREATMENT METHODS

用反应蒸发法制备氧化锡薄膜,对各样品取相同的制备条件,然后,进行不同的后处理,用扫描电子显微镜观察各样品的表面形貌,分析研究,进行了初步探讨。

Thin film of tin oxide was prepared by reactive evaporating in this paper. The samples were annealed in argon and air at 300C respectively and were activated by D. C. glow discharge. Superficial morphology of the samples were observed by scanning electron microscopies. It can be seen the particles can be changed in their sizes by post-treatment methods.