粗糙表面光学傅氏谱的数值分析及应用

NUMERICAL ANALYSIS AND APPLICATION RESEARCH ON OPTICAL FOURIER TRANSFORM SPECTRUM OF ROUGH SURFACE

以傅立叶光学理论为基础，对一维随机表面光学傅立叶频谱强度分布的数学期望进行了理论分析和数值计算，得到不同表面参数对应的谱强度分布数值表达形式，计算结果与实验符合较好在此基础上提出一种可用于表面粗糙度在线检测的模式识别方法．

On the basis of Fourier optical principle, it is analyzed that the expectationvalue of intensity distribution of optical Fourier transform spectrum (OFTS) of one-dimensionalrough surface by means of numerical calculations. The numerical expressions of OFTS of roughsurfaces with different parameters are obtained. The calculated results accord with experimentswell. A pattern recognition method based on these results for surface roughness on-linemeasurement is introduced.