摘要
基于线性分析理论,建立了柔性铰链式平面三自由度精密定位平台的分析模型;提出了一种计算该类工作台输入耦合的线性求解方法,该方法具有求解简便和计算量小等优点;针对微动工作平台的特点建立了有限元分析模型,通过有限元仿真,验证了线性法的正确性;讨论了有关参数对工作台输入耦合的影响程度,给出了对输入耦合有较大影响的设计参数。研究结果对设计低耦合输入微动工作平台具有指导意义。
The analysis model of a 3-DOF micro-positioning stage with flexure hinges is established based on the linearization theory. A linear scheme method was presented to calculate the coupled inputs, which has many advantages such as simplification and small amount of calculation. According to the characteristics of the stage, a finite element analysis model was developed. The correctness of the linear analysis method was validated by using the finite element simulation technique. Finally, the influences of the design parameters to the coupled inputs were discussed, and the key parameters are identified, which is important to design a low-coupled inputs stage.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2005年第5期377-380,共4页
China Mechanical Engineering
基金
国家自然科学基金资助项目(50375051)
教育部科学技术资助重点项目(104149)
广东省自然科学基金重点项目(036548)
高等学校优秀青年教师教学科研奖励计划资助项目
关键词
柔性铰链
微动工作台
输入耦合
有限元
micro-positioning stages
coupled input
flexure hinge
finite element