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VLSI多层互连可靠性 第二部分:应力感应失效 被引量:1

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出处 《微电子技术》 1994年第3期1-16,共16页 Microelectronic Technology
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  • 1[1]CHRISTOU A.Electromigration and electronic device degradation[M].Canada: John Wiley & Sons, Inc.,1994.
  • 2[2]OREN E E. Computer simulation laboratory[EB/OL].http://www.c sl.mete.metu.edu.tr/Electromigration.
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  • 4[4]PIERCE D G, BRUSIUS P G. Electromigration: A review [J]. Microelectronics Reliab, 1997,37(7): 1053-1072.
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  • 6[6]WU K, BRADLEY R M. Theory of electromigration failure in polycrystalline metal films[J]. Phys Rev B,1994,50(17): 12468-12487.
  • 7[7]GONZALEZ J L, RUBIO A.Shape effect on electromigration in VLSI interconnects[J]. Microelectronics Reliab,1997,37: 1073-1078.
  • 8[9]De MUNARI I, SCORZONI A, TAMARR F,et al.Drawbacks to using NIST electromigration test-structure to test bamboo metal Lines[J].IEEE Trans Elect Dev, 1994,41(12): 2276-2280.
  • 9[10]WU K B,JUPITER P. Effects of Al microstructure on electromigration using a new reactive ion etching and scanning electron microscopy technique[J]. Appl Phys Lett ,1991,58 (12): 1299-1301.
  • 10[11]OGURTANI T O, OREN E E. Computer simulation of void growth-dynamics under the action of electromigration and capillary forces in narrow thin interconnection[J]. J Appl Phys , 2001,90(3): 1564-1572.

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