摘要
在许多领域内,对微小物体的操纵一直都是极富挑战性的课题。这类技术以其在对微/纳米器件或生物学对象进行操作、加工、表征、装配及测试中的关键作用,正成为微/纳米技术尤其是微自动化领域中的一个极为重要的研究方向。本文归纳和总结了微/纳米操作技术方面的最新研究进展,并按照各种微/纳米镊的工作原理进行分类,分别对基于机械、水力学、电、磁、声、光、热以及这些效应的组合发展起来的微/纳米操作技术进行了评述,特别介绍了其中的一些典型应用。可以看到,微/纳米镊技术的发展,将给微小世界的研究和应用增添更多强有力的工具。
Manipulating very small objects has been a big challenging task in many areas. As the most basic tool to manipulate, fabricate, characterize, assemble and test the micro/nano scale devices and biological samples, micromanipulation keeps receiving attentions over the area of micro/ nano technology especially micro automation. Research along this direction is becoming a major stream in the world. This paper summarized and reviewed the latest advancement in developing the micro/nano manipulation method. According to the working principles, classifications on the currently available micro/nano tweezers were made. Particularly, those enabled from using the mechanical, hydraulic, electrical, magnetic, acoustic, optical, thermal effects or their combinations were reviewed. Some of their typical applications in manipulating the micro/nano objects were introduced. It indicates that advancement of the micro/nano tweezer technologies will create more powerful tools in studying and implementing the micro world.
出处
《微纳电子技术》
CAS
2005年第3期97-106,122,共11页
Micronanoelectronic Technology
基金
国家自然科学基金项目资助(50325622
50176053)
