摘要
气瓶柜是处理半导体特殊气体的重要装置。本文着重介绍了半导体气瓶柜吹洗系统的结构特点、设计要求，以及气体处理技术和安全操作。
Gas cabinet is an important unit used to handle special gases for semiconductor pro- cess. In this paper,a purging device for gas cabinet used in semiconductor process is described,in terms of the structural features,design requirements and gas handling techniques as well as opera- tion safety measures.
出处
《微电子学》
CAS
CSCD
1994年第5期57-63,共7页
Microelectronics
