SiO_2膜针孔的分析与检测

Detection and Analysis of Pinholes in SiO_2 Films

本文分析了ＳｉＯ＿２膜的针孔模型及漏电机理，讨论了针孔密度的概念，并用ＥＰＷ（乙二胺－邻苯二酚水溶液）法和漏电流法分析了针孔与漏电流的关系，给出了ＳｉＯ＿２膜无明显针孔的判据。

A Pin-hole model is presented,and current leakage mechanism for SiO_2 films is analyzed.The concept of pinhole density is discussed.The relationship between pinhole and leakage current is analyzed us- ing EPW(Ethyle-nediamine-pyrocatechol-Water)solution and leakage current method. The judgment condi- tion that no obvious pinholes are present in SiO_2 films has been obtained。