摘要
现代聚焦电子束、聚焦离子束装置大都采用自动聚焦、自动消象散技术，本文对目前常用的几种自动聚焦、自动消象散技术加以总结，介绍了其原理及实现方法。
ThiS paper summarizes some techn iques for automatic focusing and auto-matic astigmatism correction,These techniques are often used in modern appa-ratus of focused electron beam and focused ion beam. The principles and me-thods of these techniques have been discussed.
出处
《微细加工技术》
1994年第2期1-8,共8页
Microfabrication Technology
