摘要
本文介绍单片机在双频激光干涉工件台位置显示和微动控制中的应用，由于采用单片机使激光工件台位置显示精度高，微动控制简单、可靠。显示分辨率０．０１μｍ，位置测量精度０．０２μｍ，测量最大距离３３０ｍｍ，（实际距离１００ｍｍ），微动距离５μｍ、１０μｍ、５０μｍ、１００μｍ四档。
The application of MCS-51 single chip microcomputer to position display and micromotion control system of the laser interference stage is described. Under the single chip microcomputer control the position display has highprecision and micromotion control is simple and reliable.Position displayresolution is 0.01μm,precision of measured position is 0.02μm,maximummeasured range is 330mm(100mm available now).Micromotion displacementsare 5μm,10μm,50μm,and 100μm.
出处
《微细加工技术》
EI
1994年第2期16-21,共6页
Microfabrication Technology
关键词
电子束曝光机
激光工件台
微处理机
single chip microcomputer
electron beam exposure system
laser stage
