表面微机械结构的氧化锌压电薄膜器件的工艺研究

STUDY ON TECHNIQUE OF SURFACE MICROMACHINING STRUCTURED ZnO PIEZOELECTRIC THIN FILM DEVICES

本文对表面微机械结构的氧化锌压电薄膜器件的关键工艺进行了研究。研究了表面微机械工艺，探索了合适的工艺规范。对如何在表面微机械结构上采用Ｓ枪磁控反应溅射生长出ｃ轴定向的ＺｎＯ薄膜工艺进行了研究。

In this paper,the key techniques of surface micromachining structured zincoxide piezoelectric thin film devices are studied. The surface micromachinetechnique for ZnO thin film devices is dcveloped.C-axis oriented ZnO filmsare prepared using S-gun magnetron reactive sputtering onto polysiliconmembrane.