摘要
镱压力传感器在0─3GPa范围内,与锰铜传感器和碳阻传感器相比,更适合于冲击波的动态测量。用微细加工技术制造的薄膜镱传感器,兼有镱材材和薄膜器件的优异特点。本文叙述了镱传感器的特性与制造。
Ytterbium stress transducers,compared with manganin and carbon gauge, are more suitable for dynamic measurement of shock wave in 0-3 GPa range。Thin film ytterbium stress tranducers preparated by microfabrication techno-logy have the advantages of both ytterbium material and thin film devics。The characters and preparation of the transducers are described。
出处
《微细加工技术》
1994年第4期80-86,共7页
Microfabrication Technology
关键词
压力传感器
薄膜镜传感器
特性
制造
shock wave measurement
Yb stress transducer
thin film sensor