光刻膜片在膜片阀中的应用

Photoetching diaphragm in burst valve application

介绍了膜片光刻的工艺原理、工艺过程及其特点,论述了利用双面自对准光刻模具与膜片母材厚度之间的关系控制膜片槽深的机理,介绍了光刻膜片在膜片阀中的应用情况,经爆破试验和发动机热试车表明:膜片阀设计合理,膜片光刻工艺可行。

The principle, process and characteristics of diaphragm photoetching were introduced in this paper. The mechanism of control the depth of the slot by using the relationship between two-side auto-aligned mould and the material thickness were discussed. The application result of photoetching diaphragm in burst valve was given. Burst testing results and engine hot tests demonstrated that the burst valve was properly designed and the diaphragm photoetching process was reasonable.