磁光盘的介质膜材料AlN、AlSiN薄膜的电子显微分析

Electron Microstructure Analysis of AIN and AISiN films

本文研究了磁光盘介质薄膜──ＡｌＮ和ＡｌＳｉＮ薄膜的电子显微结构．通过透射电镜分析了ＡｌＮ薄膜的多晶结构和Ｃ轴垂直取向；通过Ｘ射线衍射分析、透射电镜分析和Ｘ射线光电子能谱分析，确定了ＡｌＳｉＮ薄膜并不是多晶ＡｌＮ和ＳｉＮ薄膜的简单组合，而是形成了稳定的非晶特征结构．且ＡｌＳｉＮ薄膜由于其非晶结构而比ＡｌＮ薄膜的磁光克尔效应增强效果更优越．

This paper reports the microstructure of AIN and AJSiN films-the dielectric films of magnetooptical disk. The TEM analyses of the AIN films show their polycrystalline structure and c-axis perpen perpendicular orientation. The XRD, TEM and XPS analyses of the AlSiN films show that the AlSiN films arenot simple mixture of the AlN and SiN, but have their characteristic amorphous st￣ure. As a resultof amorphous structure, the Kerr effect enhancement of AlSiN film is better than that of AlN film.