MCM多层金属化及刻蚀技术研究

Study of Under Bump Metal and Etch Technology of MCM

本文介绍了MCM芯片制造过程,MCM的关键工艺技术,重点介绍了MCM多层金属化及其湿式刻蚀技术。

This paper introduced the process of MCM technology, the pivotal process of the technology , and mainly introduced the technique of the etch of the UBM.