NiCr系光谱选择性吸收薄膜的结构与性能表征

CHARACTERIZATION AND OPTICAL PROPERTIES OF NiCr SYSTEM SOLAR SELECTIVE COATINGS

采用磁控溅射技术制备了优良的NiCr系深蓝色太阳光谱选择性吸收薄膜,测试了样品的太阳吸收比和热发射比,α_s=0.90～0.94,ε=0.08～0.16(80℃)。用椭偏法测量了两层膜系的光学常数,借助扫描电镜、透射电镜、X射线衍射对薄膜进行了表征,并初步讨论了溅射工艺对样品结构形貌和光学性能的影响。

NiCr system solar selective coatings with a dark blue surface were prepared by reactive magnetron sputtering process, the solar absorbance αS=0.90-0.94 and the thermal remittance Ε=0.08-0.16 (80°C). The coatings were characterized by SEM, TEM and XRD. The relations between sputtering process and the optical properties, the microstructure and the surface morphology were discussed.