5Martin Knotter D. Etching Mechanism of Vitreous Silicon Dioxide in HF-based Solutions [J]. J Am Chem SOc, 2000 (12): 4345- 4351.
6Spierings G A C M. Wet Chemical Etching of Silicate Glasses in Hydrofluoric Acid Based Solutions[J]. Journal of Materials Science, 1993 ( 28 ) : 6261-6273.
7刘利.数控弹性发射加工.机器制造与自动化,1998,(4).
8Zeng W N,Li Z C,Pei Z J,et al.Experimental observation of tool wear in rotary ultrasonic machining of advanced materials[J].International Journal of Machine Tools & Manufacture,2005,45:1468-1473.
9Spur G,Holl S E.Ultrasonic assisted grinding of ceramics[J].Journal of Materials Processing Technology,1996,62:287-293.