晶粒尺寸对薄膜电阻率温度系数的影响

EFFECT OF GRAIN SIZE ON TEMPERATURE COEFICIENT OF RESISTIVITY OF Pd THIN FILMS

报道了Ｐｄ薄膜电阻率温度系数（ＴＣＲ）随不同薄膜厚度和不同退火温度的变化．实验结果表明：薄膜ＴＣＲ值远小于体材料的值，且对晶粒尺寸有一定的依赖关系；薄膜晶粒尺寸越大，其ＴＣＲ值也越大。采用晶粒间界散射的二流体模型对此结果进行了讨论。

The temperature coefficient of resistivity(TCR)of Pd thin film with differentthicknesses and annealled at different tempertures has been investigated.Tbe experi-mental results indicated that the TCR value of thin films is much smaller than thatof bulk material and it also depcnds on grain size of the tbin films.It was foundthat tbe TCR is higher for larger grain size,The result is explained readily byusing the twofluid model。