摘要
提出了用能量为1.5-2.5MeV的质子弹性背散射分析(elasticbackscattering,缩写为EBS)来测定薄膜中的氧含量,这个方法对于厚度为几十纳米到几个微米的样品,测量精度约5%。采用RBS分析并结合EBS分析,可全面测得薄膜中各元素的含量。
In this paper,a technique of proton elastic backscattering(EBS)in the energyrange of 1.5-2.5MeV is proposed for the measurement of the total contents of oxy-gen in the films.The accuracy is better than 5% for the film thickness between less than hundreds nm to a few microns。
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
1994年第2期340-344,共5页
Acta Physica Sinica