簿膜结构分析中的低角X射线衍射方法

SMALL.ANGLE X-RAY DIFFRACTION IN ANALYSES OF THE STRUCTURE OF COATINGS

利用带折射修正的布喇格衍射定律和薄膜光学理论分析了低角Ｘ射线衍射谱中出现的一系列现象，导出了多层膜周期厚度和周期中不同材料间的配比率的计算公式，对多层膜的低角Ｘ射线衍射谱中主峰间的次峰现象作出了解释，并对低角Ｘ射线衍射测量单层膜厚度进行分析，给出了精确的测厚公式。

The period thickness,mean refraction corrected factor and the ratio betweentwo difference materials in a period can be deduced from the Bragg equationwith refraction correction.Based on this Bragg' s law and theory of optical thin film,the formula introduced in this paper have been verified in theory and experimentwith short-period Mo/Si multilayers.