摘要
多孔硅是晶体硅片在氢氟酸溶液中进行阳极氧化,在硅衬底上形成多孔态的硅材料。本文介绍了多孔硅的形成和结构形貌,对其光学性质和发光机制进行了扼要讨论,并介绍了当前多孔硅研究中的一些热点问题。
Porous silicon is a porous morphological form of silicon formed on the crystalline st substrateby anodization in HF solution.The structure morphologics and formation mechanism and optical properties are reviewed and the focal POint of the research at present is introduced in the paper.
出处
《西安理工大学学报》
CAS
1994年第2期105-110,共6页
Journal of Xi'an University of Technology